Công ty Tăng Minh Phát Việt Nam là Nhà phân phối của hãng Brook Instrument tại Việt Nam. Chúng tôi chuyên cung cấp Lưu lượng kế trong môi trường nhiệt độ cao (model 9861) chính hãng Brook-Instrument giá cạnh tranh:

Email : [email protected]

[email protected]

Skype: long.tmpvietnam

Yahoo: longtmp

Features

• Ultra-stable patented IsoSensor™ flow measurement sensor
• Ultra-high purity flow path
• Remote electronics come standard with two analog electrical connectors
• Digital measurement and control architecture

Benefits

• High stability sensor delivers superior uptime, reducing maintenance and lowering total cost of ownership
• All-metal wetted flow path ensures integrity and purity of gas/vapor
• Included 20 pin card edge and a 9 or 15 pin “D” connector enables standardization and reduces inventory
• Enhanced accuracy and process control

Applications

• Optical fiber manufacturing - MCVD
• Silicon semiconductor device fabrication processes

9861 Flow Range (Full Scale Capacity) 3 sccm - 10 slm (N2 equivalent) Surface Finish 4µ inch Ra Accuracy

±1% SP @ 35 - 100% FS

±0.35% FS @ <35% FS

Repeatability < ±0.15% FS Response Time

≤ 1 sec to within 2% of SP (per SEMI E17-91)

Diagnostic Capability Analog Communication

0-5 Vdc

Digital Communication

RS485L Protocol

Chúng tôi cung cấp đầy đủ các thiết bị từ hãng Brook-Instrument:

100% USA Origin Brooks Instrument Vietnam Recalibration Model 5853S/BE2BA3BB2BA1B1 For Flow rate between 100-200 slpm N2 Equivalent Action : Only recalibration. Extra charges if repair required. 100% USA Origin Brooks Instrument Vietnam Recalibration Model 5851S/BD2BA1BB2BA1B1 Action : Only recalibration. Extra charges if repair required 100% USA Origin Brooks Vietnam SLA5853 Thermal Mass Flow Controller Model: SLA5853SZXXXX Flow Meter, Body 3 Digital I/O. Communications Smart Emulation (Analog and/or RS485) Mechanical Connections 10mm Tube Compression O-ring Material Viton Valve Seat Material Viton Valve Type Normally Closed (Press Diff > 2 bar) Analog I/O 0-5 VDC Power Supply +24 Vdc Output Enhancement Standard Setting / Response Time Certification Standard Location (Safe Area) Customer Process Fluid : Air Normal Upstream Pressure : 7 bar-a Normal Downstream Pressure : 1-5 bar-g Meter Specifications Meter Flow (Full Scale) : 400 ln/min Reference Temp : 0 degC Accuracy : +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) Max Pressure Rating : 70 bar-g Max Temperature : 65 °C Note: Spec reference to T88253/009. (Mass flow contronllers and metters BROOKS INSTRUMENT 6718WX - THE NETHERLANDS SN/Year: T88253/009 2008 Modelnumber: 5853SBZ1039 I/O Signal: 0 - 5VDC 0 - 5VDC & 0 - 20 mA OP - Press: pa = 7 Bar Range/ fluid: 0 - 400 ln/min Air DN 10 Limit PS 70 barg@TS: 21 độ C PT 105 barg@TS: 21 độ C) 100% USA Origin Brooks Instrument Vietnam Brooks SLA5850 Thermal Mass Flow Controller Model Code : SLA5850SB1DD1B2A1 SLA5850S Flow Controller, Body 0 Digital I/O. Communications S Smart Emulation (Analog and/or RS485) Mechanical Connections B1 1/4” Tube Compression w/Filter O-ring Material D Kalrez Valve Seat Material D Kalrez Valve Type 1 Normally Closed Analog I/O B 0-5 VDC Power Supply 2 +24 Vdc Output Enhancement A Standard Setting / Response Time Certification 1 Standard Location (Safe Area) (MFC 1: 5850S/BC1GA0AAACA1B1 Flowrate (30 ml – 3000ml/min) for wet gas(10% wt SO2 +N2 balance). Ope. Pressure max: ? (avoid SO2 condensate to liquid) if condition at Temp: 35°C and the flow: wet gas(10% wt SO2 +N2 balance) Output signal: 0..5 Vdc with RS232 interface Setpoint signal: 0…5 Vdc or 0..100% RS232 Connections: 1/4” OD Compression type (male) Seals: Kalrez 6375) 100% USA Origin Brooks Vietnam SLA5860 Thermal Mass Flow Meter Model Code : SLA5860SB1DA0B2A1 SLA5860S Flow Meter, Body 0 Digital I/O. Communications S Smart Emulation (Analog and/or RS485) Mechanical Connections B1 1/4” Tube Compression w/Filter O-ring Material D Kalrez Valve Seat Material A None Valve Type 0 None Analog I/O B 0-5 VDC Power Supply 2 +24 Vdc Output Enhancement A Standard Setting / Response Time Certification 1 Standard Location (Safe Area) Customer Process Fluid: 10% SO2, 5% Water vapor, 85% N2 (percentage in mass) Normal Upstream Pressure: 60-150 psig Normal Downstream Pressure: 0-110 psig Operating temperature : 65 degC Meter Specifications Meter Flow (Full Scale): 3000 mlst/min Reference Temp: 70 degF Accuracy: +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) Max Pressure Rating: 100 bar-g Max Temperature: 65 °C NOTE: Operating temp cannot exceed 65 degC (MFM 1: 5860S/BC1GA0AACA1B1 Request: Need to measure correctly (30 ml – 3000ml/min) for wet gas (10% wt SO2 + 5% steam +N2 balance). Flow range: 0…3 ln/min for wet gas(10% wt SO2 + 5% steam +N2 balance) Inlet pressure: max. 150 psig @ 70°C max. 60 psig @ 35°C Outlet pressure: 0…110 psig @ 70°C 0 psig @ 35°C Temperature: 35°C…70°C Output signal: 0..5 Vdc with RS232 interface Setpoint signal: 0…5 Vdc or 0..100% RS232 Connections: 1/4” OD Compression type (male) Seals: Kalrez 6375) 100% USA Origin Brooks Instrument Vietnam Brooks SLA5860 Thermal Mass Flow Meter Model Code : SLA5860SB1DA0B2A1 SLA5860S Flow Meter, Body 0 Digital I/O. Communications S Smart Emulation (Analog and/or RS485) Mechanical Connections B1 1/4” Tube Compression w/Filter O-ring Material D Kalrez Valve Seat Material A None Valve Type 0 None Analog I/O B 0-5 VDC Power Supply 2 +24 Vdc Output Enhancement A Standard Setting / Response Time Certification 1 Standard Location (Safe Area) Customer Process Fluid : 10% CH4O (methanol), 10% Water vapor, 30% CO2, 50% H2 (percentage in mass) Normal Upstream Pressure : 1.5-10 bar-g Operating temperature : 65 degC Meter Specifications Meter Flow (Full Scale) : 1000 mlst/min Reference Temp : 70 degF Accuracy : +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) Max Pressure Rating : 100 bar-g Max Temperature : 65 °C NOTE: 1) Operating temp cannot exceed 65 degC. 2) Metal seals not available. (MFM 2: 5860S/BC1GA0AACA1B1 Flow: 20…1000 ml/min for wet gas (10% wt MeOH vapour +10% steam +30%CO2 50%H2). Inlet pressure:. 1.5 barg….10 barg Temperature: 35°C…80°C Output signal: 0..5 Vdc with RS232 interface Setpoint signal: 0…5 Vdc or 0..100% RS232 Connections: 1/4” OD Compression type (male) Seals: Metal) 100% USA Origin Brooks Vietnam SLA5853 Thermal Mass Flow Controller Model: SLA5853SZXXXX Flow Meter, Body 3 Digital I/O. Communications Smart Emulation (Analog and/or RS485) Mechanical Connections 10mm Tube Compression O-ring Material Viton Valve Seat Material Viton Valve Type Normally Closed (Press Diff > 2 bar) Analog I/O 0-5 VDC Power Supply +24 Vdc Output Enhancement Standard Setting / Response Time Certification Standard Location (Safe Area) Customer Process Fluid : Air Normal Upstream Pressure : 7 bar-a Normal Downstream Pressure : 1-5 bar-g Meter Specifications Meter Flow (Full Scale) : 400 ln/min Reference Temp : 0 degC Accuracy : +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) Max Pressure Rating : 70 bar-g Max Temperature : 65 °C Note: Spec reference to T88253/009. (Mass flow contronllers and metters BROOKS INSTRUMENT 6718WX - THE NETHERLANDS SN/Year: T88253/009 2008 Modelnumber: 5853SBZ1039 I/O Signal: 0 - 5VDC 0 - 5VDC & 0 - 20 mA OP - Press: pa = 7 Bar Range/ fluid: 0 - 400 ln/min Air DN 10 Limit PS 70 barg@TS: 21 độ C PT 105 barg@TS: 21 độ C) 100% USA Origin Brooks Instrument Vietnam Brooks Model 2500 Series Flowmeters Code: 2530A4A68SNVT 2530 Acrylic Flowmeter Revision A: Revision A Tube Tube 4A68: 2-20 SCFM Air Fittings S: Stainless Steel Valve N: No Valve Seals VT: Viton 100% USA Origin Brooks Vietnam Brooks Oval Flowmeters Replaced by: BM04 Code: BM04ASSF2H1CKAA (Brooks Oval Flowmeters, BM Oval Series, Models BM04 Through BM50 ® Code: BM04ASSN2N1ARAA) 100% USA Origin Brooks Vietnam SLAMF63 Thermal Mass Flow Meter Replaced by: SLAMF63S3ABA0G2A1A5D1AA1F Digital I/O. Communications S: Smart Emulation (Analog and/or RS485) Mechanical Connections 3A: DIN DN15 PN40 O-ring Material B: Buna Valve Seat Material A: None (Meter) Valve Type 0: None Analog I/O G: 4-20mA I/O (PG11 Cable Gland) Power Supply 2: +24 Vdc Output Enhancement A: Standard Setting / Response Time Certification 1: Standard Location (Safe Area) Valve Orifice Size: A No Orifice Mass Flow Restrictor Type 5: LFE Flow Restrictor Size D: Size D Calibration conditions 1: Single S-series calibration OEM Code A: Standard Brooks Label Software Revision A: Revision A Mounting Attitute 1: Horizontal base down Baudrate F: 19200 Customer Process: Fluid: CO2 Normal Upstream Pressure: 18 bar-g Meter Specifications: Meter Flow (Full Scale): 40 kg/hr Reference Temp : 21.1 degC Accuracy: +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) Max Pressure Ratin: 70 bar-g Max Temperature: 65 °C Ingress Protection: IP66 SLAMF63S3ABA0G2A1A5D1AA1F voi IP 66 Note: IP 66 tot hon IP65 (SLA5863S3ABA0C2A1A5D1AA IP65) 100% USA Origin Brooks Instrument Vietnam Model Code: SLA5853S2CAB2B2A1 SLA5853 Mass Flow Controller Digital I/O, Communication S: Smart Emulation (analog or RS-485) Mechanical Connection 2C: 3/8” Compression O-ring material A: Viton Valve Seat material B: Viton Valve Type 2: Normally Close Analog I/O B: 0-5 Volt Power Supply 2: +24 Vdc Output Enhancement A: Standard Setting / Response time Certification 1: Standard Location * Customer Process Data: Fluid: Air Upstream Pressure: 5-10 kg/cm2-g Downstream Pressure: Customer to advice * Meter Specifications: Meter Range (Full Scale): 500 slpm Ref Temperature: 70 degF Accuracy: +/- 1% Rate Max Pressure Rating: 100 bar g Max Temperature: 65 °C NOTE: Please confirm whether it is ln/min, lst/min or la/min that you need. (Brooks Instrument mass flow controller for nitrogen and air. - Flow rate: 0 - 500 lit/minute - Compress air about 5 - 10 kg/cm2 - I/O digital signal can controlled by computer. - Material for flow meter is metal) 100% USA Origin Brooks Vietnam SLAMF63 Thermal Mass Flow Meter Replaced by: SLAMF63S3ABA0G2A1A5D1AA1F Digital I/O. Communications S: Smart Emulation (Analog and/or RS485) Mechanical Connections 3A: DIN DN15 PN40 O-ring Material B: Buna Valve Seat Material A: None (Meter) Valve Type 0: None Analog I/O G: 4-20mA I/O (PG11 Cable Gland) Power Supply 2: +24 Vdc Output Enhancement A: Standard Setting / Response Time Certification 1: Standard Location (Safe Area) Valve Orifice Size: A No Orifice Mass Flow Restrictor Type 5: LFE Flow Restrictor Size D: Size D Calibration conditions 1: Single S-series calibration OEM Code A: Standard Brooks Label Software Revision A: Revision A Mounting Attitute 1: Horizontal base down Baudrate F: 19200 Customer Process: Fluid: CO2 Normal Upstream Pressure: 18 bar-g Meter Specifications: Meter Flow (Full Scale): 40 kg/hr Reference Temp : 21.1 degC Accuracy: +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) Max Pressure Ratin: 70 bar-g Max Temperature: 65 °C Ingress Protection: IP66 SLAMF63S3ABA0G2A1A5D1AA1F voi IP 66 Note: IP 66 tot hon IP65 (SLA5863S3ABA0C2A1A5D1AA IP65) 100% USA Origin Brooks Vietnam 0254 Read Out & Control Code: 0254AA2B23A Type Housing: Panel Mount Kit Power Cord For Power Supply: European Power Cord For 220 VAC Power Supply Output Voltage: + 24 VDC Input/Output Pinout and Signal Adapters: Current Pinout / Voltage Pinout Adapter Set Options: RS-232 cable, 3 meter, 9 pin Female “D” OEM Code: Standard Brooks Labelling 100% USA Origin Brooks Vietnam 0254 Read Out & Control Code: 0254AA2B23A Type Housing: Panel Mount Kit Power Cord For Power Supply: European Power Cord For 220 VAC Power Supply Output Voltage: + 24 VDC Input/Output Pinout and Signal Adapters: Current Pinout / Voltage Pinout Adapter Set Options: RS-232 cable, 3 meter, 9 pin Female “D” OEM Code: Standard Brooks Labelling 100% USA Origin Brooks Instrument Vietnam Brooks SLA5863 Thermal Mass Flow Meter Model: SLA5863S3ABA0C2A1A5D1AA (Model: SLA5863S3A0C2A1A5D1AA SN : F13319-001 Gas : CO2 Flow rate : 0-40kg/h) 100% USA Origin Brooks Instrument Vietnam Brooks SLA5863 Thermal Mass Flow Meter Model: SLA5863S3ABA0C2A1A5D1AA (Model: SLA5863S3A0C2A1A5D1AA SN : F13319-001 Gas : CO2 Flow rate : 0-40kg/h) 100% USA Origin Brooks Instrument Vietnam Replaced by: 1250A-D6041 Brooks Instrument Flowmeter 1250 Glass Tube Flow meter 1250A: Glass Tube Flow Meter With Horizontal Connections Tube model: D6041 Glass float Fluid Type: Air Unit of measurement: CCM End Block Material: Stainless Steel Valve Designation: Needle Valve at inlet O-ring material: Viton Fitting: 1/4" NPT-F Note: 1510 model is discontinued. Replacement model is 1250. But flow range is not exactly same. I quoted 20-900 ccm Air. Next higher is 50-1200 ccm (Model: 1510 with meet the below specifications Pressure: 300psig up to 250oF max Material : Glass 316SS Connections: 1/4"NPT Type of Fluid: Gas. Flow range: 100-1000ccm Line valve inlet) 100% USA Origin Brooks Vietnam 3809 Armored Flowmeter 3809/E12D1BEAEAA Note: · We are assuming it is water for now. Do find out the liquid density and viscosity and the flow range required. · This model we quoted comes with 4-20mA output transmitter. · We follow the code your sales engineer provided. · If signal output is not required, please confirm then price is much lower. (Model: 3809E12D1) 100% USA Origin Brooks Instrument Vietnam 5850E Mass Flow Controller Brooks Instrument Model: 5850EC1BF3PB2A S/N: 8611HCO23461/1.